The all-new JIB-PS500i is a versatile FIB-SEM that combines quick sample preparation, SEM imaging, and EDS analysis in one instrument. It is versatile enough to be used in industry and academia.
Key Features
Fast High-Quality TEM Sample Preparation
The new FIB stage allows for faster transitions between processing and imaging while also providing real-time feedback on specimen quality. By creating samples thinner than 30 nm, the FIB-SEM allows for higher atomic resolution imaging and analysis using STEM and TEM. A retractable STEM detector allows for the simultaneous acquisition of bright and dark field images, allowing for a more precise evaluation of TEM sample preparation.
New Large Chamber/Stage for Ultimate Flexibility
The FIB’s large specimen chamber, complete with an easy-access door and stage, enables an efficient workflow and versatility with a wide range of samples and processes. The 5-axis full-eucentric large motor stage accommodates large samples and has a wide range of XY travel, stage tilt, and rotation.
New FIB Column with Higher Current and Superior Performance at Low kV
The high current (up to 100 nA) FIB column is particularly useful for large-area milling and examination of semiconductor materials. The new FIB boasts high-performance fine milling capabilities, which are critical for excellent lamella preparation for imaging, EDS analysis, and 3D microscopy.
The new JIB-PS500i is engineered to deliver excellent performance in the low kV range, as low as 0.5 kV, which is critical for beam-sensitive materials.
Robust Workflow with TEM-Linkage
A new high-throughput, robust workflow for specimen preparation and TEM imaging. The TEM-Linkage system consists of a double tilt cartridge and a TEM holder that allows samples to be transferred directly from the FIB to the TEM.