The JSM-IT510 InTouchScope™ SEM Series combines cutting-edge intelligent technology with integrated automation to provide today's most versatile analytical SEM.
Smart – Flexible – Powerful
Smart
With JEOL's latest advances, the InTouchScope™ series SEMs make advanced microscopy accessible to users of all experience levels. This intelligent technology provides the best auto functions, from alignment to focus, for quick, crisp, and clear images. It also offers live EDS spectrum and X-ray maps, and smooth navigation from optical to SEM imaging.
JEOL takes this even further with Simple SEM, which has built-in automation for image collection in various places and situations. Their SEM technology streamlines even the most mundane activities, making workflows more efficient. Analytical spatial resolution is better understood thanks to the integrated Signal Depth display. All of this technology is packed into a small platform for unmatched ease of use.
Flexible
There is a range of platforms available, so the most appropriate system can be chosen for each user. JEOL offers both high-vacuum and low-vacuum variants, either with or without the Live (embedded) EDS system. This includes JSM-IT510, JSM-IT510A, JSM-IT510LV, and JSM-IT510LA. The spacious specimen chamber of this SEM series may hold several detectors and attachments, including heating/cooling substages, EDS, WDS, EBSD, CL, STEM, and more.
Powerful
The high-resolution W filament source (LaB6 option) has unparalleled low-kV performance. The JSM-IT510 features a large analytical chamber and stage. The stage is positioned inside the chamber, allowing users to precisely position large, heavy, and unusually shaped objects before exiting the chamber.
Zeromag’s integrated color camera enables easy navigation to the area of interest and a smooth transition to SEM imaging and analysis. All data is linked, providing a quick view of analysis locations.
The new high-sensitivity quadrant BSE detector can provide live 3D surface reconstruction, which improves the perspective of specimens with complicated topography, such as a fracture surface, plating flaw, etc. Analytical models include JEOL’s fully embedded EDS system, which provides Real-Time EDS spectra and Live X-ray maps.
Key Features
- Specimen Exchange Navi: A comprehensive step-by-step approach from specimen introduction to automatic image creation. Zeromag: Simplifies navigation by allowing a smooth transition from optical to SEM images. All data is linked, including color images, SEM images, and EDS data for a map of all analysis locations.
- Live EDS: JEOL EDS is fully integrated with Real-Time Live Spectrum and Live X-ray Map.
- Simple SEM: Simplify the workflow and automate routine imaging activities.
- High and low vacuum with expanded pressure are available for each sample type.
- Montage: Automate large-area image mosaics (stitching) and EDS maps (analytical models).
- No compressed gas is required, making the system easy to maintain. Easy source change and automated alignments further simplify things.
Advanced Options
Stage Navigation System Large Sample (SNSLS)
The incorporated color camera, Stage Navigation System (SNS), allows seamless navigation of samples up to 100 mm × 100 mm. A new option for larger samples has a 200 mm × 200 mm field of view.

Image Credit: JEOL USA, Inc.
Low Vacuum Hybrid Secondary Electron Detector (LHSED)
This unique detector gathers electron and photon signals with high signal quality and enhanced topographic information in low vacuum mode, as well as photon (CL) signals in both high and low vacuum modes.

Image Credit: JEOL USA, Inc.
Smile View™ Map
The JSM-IT510, equipped with the innovative quadrant BSE detector, provides a live 3D picture of the specimen's surface. The addition of the Smile View™ Map option extends functionality with advanced tools for image enhancement, surface metrology, and texture analysis, including detailed height profiling and surface roughness measurement.

Image Credit: JEOL USA, Inc.

Image Credit: JEOL USA, Inc.